A 0.3-mW/Ch 1.25 V Piezo-Resistance Digital ROIC for Liquid-Dispensing MEMS

A 0.35µm 1.25V piezo-resistance digital ROIC for liquid dispensing MEMS

A Compact and Low-Power CMOS Circuit for Fully Integrated NEMS Resonators

A femtogram resolution mass sensor platform based on SOI electrostatically driven resonant cantilever. Part II: Sensor calibration and glycerine evaporation rate measurement

scientific article published on 18 April 2006

A femtogram resolution mass sensor platform, based on SOI electrostatically driven resonant cantilever. Part I: Electromechanical model and parameter extraction

scientific article published on 18 April 2006

A finite element mesh tailored to full NIL process modelling: hot embossing, cool-down and stamp release

A novel high-throughput on-wafer electromechanical sensitivity characterization system for piezoresistive cantilevers

A statistical analysis of nanocavities replication applied to injection moulding

A test vehicle and a two step procedure to evaluate a massive number of single-walled carbon nanotube field effect transistors

article

AFM lithography for the definition of nanometre scale gaps: application to the fabrication of a cantilever-based sensor with electrochemical current detection

AFM lithography of aluminum for fabrication of nanomechanical systems

scientific article published on 01 October 2003

Ampacity and electrical properties of thermally treated ultrathin carbon membranes grown by focused ion beam induced deposition of phenanthrane

Anisotropic growth of long isolated graphene ribbons on the C face of graphite-capped6H-SiC

scholarly article in Physical Review B, vol. 80 no. 12, September 2009

Arrays of suspended silicon nanowires defined by ion beam implantation: mechanical coupling and combination with CMOS technology

scientific article published in February 2018

Assessing the Local Nanomechanical Properties of Self-Assembled Block Copolymer Thin Films by Peak Force Tapping

scientific article published on 16 October 2015

Atomic force microscopy local anodic oxidation of thin Si[sub 3]N[sub 4] layers for robust prototyping of nanostructures

Atomic force microscopy local oxidation of silicon nitride thin films for mask fabrication

article by Irene Fernandez-Cuesta et al published 6 October 2005 in Nanotechnology

Atomic force microscopy study on the attachment of E. coli and S. aureus to a patterned surface of different materials

Batch wafer scale fabrication of passivated carbon nanotube transistors for electrochemical sensing applications

article

Block co-polymer guided self-assembly by surface chemical modification: optimization of multiple patterning process and pattern transfer

Block co-polymer multiple patterning directed self-assembly on PS-OH brush layer and AFM based nanolithography

Boosting the local anodic oxidation of silicon through carbon nanofiber atomic force microscopy probes

scientific article published on 19 January 2015

Bottom-up silicon nanowire resonators for nanomechanical sensing: Controlled fabrication technology and high-sensitivity frequency modulation transduction

CMOS Cantilever-based Oscillator for Attogram Mass Sensing

CMOS integrated MEMS resonator for RF applications

CMOS integrated nanomechanical mass sensors: determination of evaporation rate of femtoliter droplets

CVD oriented growth of carbon nanotubes using AlPO4-5 and L type zeolites

Characterization of antiresonant reflecting optical waveguide devices by scanning near-field optical microscopy.

scientific article

Conductive Atomic Force Microscopy for Nanolithography Based on Local Anodic Oxidation

Conductivity of SU-8 Thin Films through Atomic Force Microscopy Nano-Patterning

Confinement of water droplets on rectangular micro/nano-arrayed surfaces.

scientific article published on 7 June 2016

Correction to "Improved boundary conditions for the beam propagation method"

scholarly article published in IEEE Photonics Technology Letters

Coupling Resonant Micro and Nanocantilevers to Improve Mass Responsivity by Detectability Product

article published in 2007

Creation of guiding patterns for directed self-assembly of block copolymers by resistless direct e-beam exposure

Creation of guiding patterns for directed self-assembly of block copolymers by resistless direct e-beam exposure

Crystalline silicon cantilevers for piezoresistive detection of biomolecular forces

Current, charge, and capacitance during scanning probe oxidation of silicon. I. Maximum charge density and lateral diffusion

Current, charge, and capacitance during scanning probe oxidation of silicon. II. Electrostatic and meniscus forces acting on cantilever bending

DNA hybridization detection by electrochemical impedance spectroscopy using interdigitated gold nanoelectrodes

Density variations in scanned probe oxidation

Design and Synthesis of Aviram-Ratner-Type Dyads and Rectification Studies in Langmuir-Blodgett (LB) Films

scientific article published on 01 July 2016

Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit

article by J. Verd et al published June 2005 in IEEE Journal of Microelectromechanical Systems

Directed Self-Assembly of Block Copolymers for the Fabrication of Functional Devices

scientific article published on 21 October 2020

Dynamic range enhancement of nonlinear nanomechanical resonant cantilevers for highly sensitive NEMS gas/mass sensor applications

Dynamic stencil lithography on full wafer scale

Editorial on the 30th anniversary of Microelectronic Engineering

Electrical transduction in nanomechanical resonators based on doubly clamped bottom-up silicon nanowires

Electrochemical platinum coatings for improving performance of implantable microelectrode arrays

scientific article published on 01 December 2002

Electron- and ion-beam lithography for the fabrication of nanomechanical devices integrated on CMOS circuits

Enabling electromechanical transduction in silicon nanowire mechanical resonators fabricated by focused ion beam implantation

scientific article published on 04 March 2014

Evaluating the compressive stress generated during fabrication of Si doubly clamped nanobeams with AFM

Evaporation of Femtoliter Sessile Droplets Monitored with Nanomechanical Mass Sensors

scientific article published on 24 October 2007

Excitation of fluorescent nanoparticles by channel plasmon polaritons propagating in V-grooves

Exploring Strategies to Contact 3D Nano-Pillars

scientific article published on 10 April 2020

Fabrication and electrical characterization of bottom-up silicon nanowire resonators

Fabrication of complementary metal-oxide-semiconductor integrated nanomechanical devices by ion beam patterning

Fabrication of functional electromechanical nanowire resonators by focused ion beam implantation

Fabrication of nanogaps for MEMS prototyping using focused ion beam as a lithographic tool and reactive ion etching pattern transfer

Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensors

scientific article published on 01 January 2012

From VHF to UHF CMOS-MEMS monolithically integrated resonators

From an Organometallic Monolayer to an Organic Monolayer Covered by Metal Nanoislands: A Simple Thermal Protocol for the Fabrication of the Top Contact Electrode in Molecular Electronic Devices

Full wafer integration of NEMS on CMOS by nanostencil lithography

Full-wafer fabrication by nanostencil lithography of micro/nanomechanical mass sensors monolithically integrated with CMOS

scientific article published on 16 June 2008

Fully integrated nanoresonator system with attogram/Hz mass resolution

Functional dependence of resonant harmonics on nanomechanical parameters in dynamic mode atomic force microscopy

scientific article

Gold interdigitated nanoelectrodes as a sensitive analytical tool for selective detection of electroactive species via redox cycling

Grain-Boundary-Induced Alignment of Block Copolymer Thin Films

scientific article published on 04 January 2020

Graphene crystal growth by thermal precipitation of focused ion beam induced deposition of carbon precursor via patterned-iron thin layers

Grazing-incidence small-angle X-ray scattering of soft and hard nanofabricated gratings

Guided self-assembly of block-copolymer for CMOS technology: a comparative study between grapho-epitaxy and surface chemical modification

H-bonding driven assembly of colloidal Au nanoparticles on nanostructured poly(styrene-b-ethylene oxide) block copolymer templates

High surface coverage of a self-assembled monolayer by in situ synthesis of palladium nanodeposits.

scientific article published on 31 August 2017

High-sensitivity capacitive readout system for resonant submicrometer-scale cantilevers based sensors

High-sensitivity linear piezoresistive transduction for nanomechanical beam resonators

scientific article published in Nature Communications

Horizontally patterned Si nanowire growth for nanomechanical devices.

scientific article published on 12 February 2013

Identifying the nature of surface chemical modification for directed self-assembly of block copolymers

scientific article published on 21 September 2017

Improved boundary conditions for the beam propagation method

Improved properties of epoxy nanocomposites for specific applications in the field of MEMS/NEMS

Increasing the elastic modulus of graphene by controlled defect creation

Influence of Process-Voltage-Temperature variations on the behavior of a hybrid SET-FET circuit

Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications

Interaction of biomolecules sequentially deposited at the same location using a microcantilever-based spotter

scientific article published in August 2008

Large-signal model of a resonating cantilever-based transducer for system level electrical simulation

Laser Fabrication of Polymer Ferroelectric Nanostructures for Nonvolatile Organic Memory Devices

scientific article published on 17 August 2015

Light propagation studies on laser modified waveguides using scanning near-field optical microscopy

Local growth of carbon nanotubes by thermal chemical vapor deposition from iron based precursor nanoparticles

Local oxidation of silicon surfaces by dynamic force microscopy: Nanofabrication and water bridge formation

MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing (Invited Paper)

article

Mass Sensors: Small 2/2009

Massive manufacture and characterization of single-walled carbon nanotube field effect transistors

article

Mechanical Detection of Carbon Nanotube Resonator Vibrations

scientific article published in Physical Review Letters

Mechanical detection and mode shape imaging of vibrational modes of micro and nanomechanical resonators by dynamic force microscopy

Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution

scientific article published on 11 July 2011

Micro/nanomechanical resonators for distributed mass sensing with capacitive detection

Mixing in a 220MHz CMOS-MEMS

Monitoring the evaporation of femtoliter droplets with CMOS integrated nanomechanical mass sensors

Monolithic 0.35-μm CMOS Cantilever for Mass Sensing in the Attogram Range with Self-Excitation

Monolithic CMOS-MEMS oscillators with micro-degree temperature resolution in air conditions

NEMS/CMOS sensor for monitoring deposition rates in stencil lithography

Nano-confinement of block copolymers in high accuracy topographical guiding patterns: modelling the emergence of defectivity due to incommensurability

scientific article published on 12 July 2018

Nanocantilever Beam Fabrication for CMOS Technology Integration

Nanocantilever based mass sensor integrated with CMOS circuitry

Nanofabrication of Fresnel zone plate lenses for X-ray optics

Nanolithography on thin layers of PMMA using atomic force microscopy

Nanomechanical Mass Sensor for Spatially Resolved Ultrasensitive Monitoring of Deposition Rates in Stencil Lithography

scientific article published on 01 February 2009

Nanomechanical mass sensor for monitoring deposition rates through confined apertures

Nanomechanical properties of solvent cast polystyrene and poly(methyl methacrylate) polymer blends and self-assembled block copolymers

Nanoparticles with tunable shape and composition fabricated by nanoimprint lithography

article

Nanopatterning by AFM nano-oxidation of thin aluminum layers as a tool for the prototyping of nanoelectromechanical systems

scholarly article published 29 April 2003

Nanoscale Modification of H-Terminated n-Si(100) Surfaces in Aqueous Solutions with an in Situ Electrochemical Scanning Tunneling Microscope

Nanoscale reduction of graphene oxide thin films and its characterization

scientific article published on 29 June 2015

Nonlinear detection mechanism in quantitative atomic force microscopy characterization of high-frequency nanoelectromechanical systems

scholarly article in Physical Review B, vol. 85 no. 3, January 2012

Novel methods to pattern polymers for microfluidics

On the assessment by grazing-incidence small-angle X-ray scattering of replica quality in polymer gratings fabricated by nanoimprint lithography

Opto-thermal actuation in double layer polymer microcantilevers

Oxide nanocrystal based nanocomposites for fabricating photoplastic AFM probes.

scientific article published on 22 August 2011

Pattern transfer optimization for the fabrication of arrays of silicon nanowires

Piezoresistive Microcantilevers for Biomolecular Force Detection

Piezoresistive cantilever force sensors based on polycrystalline silicon

Piezoresistive cantilevers in a commercial CMOS technology for intermolecular force detection

Piezoresistive probes for (biomolecular) force sensing

Polysilicon piezoresistive cantilevers for intermolecular force detection

Polystyrene as a brush layer for directed self-assembly of block co-polymers

Post-CMOS Integration of Nanomechanical Devices by Direct Ion Beam Irradiation of Silicon

Predictive model for scanned probe oxidation kinetics

Preface

Preparation of nascent molecular electronic devices from gold nanoparticles and terminal alkyne functionalised monolayer films

Properties and applications of carbon nanofibers for atomic force microscopy

Quantification of nanomechanical properties of surfaces by higher harmonic monitoring in amplitude modulated AFM imaging

scientific article published on 31 January 2018

Real time protein recognition in a liquid-gated carbon nanotube field-effect transistor modified with aptamers

scientific article

Resonant Metal Cantilever with Attogram/Hz Mass Sensitivity Fully Integrated in a Standard 0.35-μm CMOS Process

Resonant tunnelling features in a suspended silicon nanowire single-hole transistor

Response of carbon nanotube transistors to electron beam exposure

article

Role of Penetrability into a Brush-Coated Surface in Directed Self-Assembly of Block Copolymers

scientific article published on 11 January 2019

SOI-silicon as structural layer for NEMS applications

STM-Induced Hydrogen Desorption via a Hole Resonance

scientific article published in Physical Review Letters

Scanning near-field optical microscope for the characterization of optical integrated waveguides

Self sensing cantilevers for the measurement of (biomolecular) forces

Self-assembly of block copolymers under non-isothermal annealing conditions as revealed by grazing-incidence small-angle X-ray scattering

scientific article published on 19 August 2020

Sensor based on arrays of sub-micrometer scale resonant silicon cantilevers integrated monolithically with CMOS circuitry

Sequential Infiltration of Self-Assembled Block Copolymers: A Study by Atomic Force Microscopy

Silicon microcantilevers with MOSFET detection

Stress and aging minimization in photoplastic AFM probes

article published in 2009

Sub-10 nm resistless nanolithography for directed self-assembly of block copolymers.

scientific article published on 13 November 2014

Suspended tungsten-based nanowires with enhanced mechanical properties grown by focused ion beam induced deposition

scientific article published on 21 August 2017

The measurement of the tip current noise as a method to characterize the exposed area of coated ESTM tips

Thermal scanning probe lithography for the directed self-assembly of block copolymers

scientific article

Top-Down CMOS-NEMS Polysilicon Nanowire with Piezoresistive Transduction

scientific article published on 14 July 2015

Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution

scientific article published on 18 March 2015

Towards a metallic top contact electrode in molecular electronic devices exhibiting a large surface coverage by photoreduction of silver cations

Towards individual electrical contact of nanoparticles in nanocomposites

Towards molecular electronic devices based on 'all-carbon' wires

article published in 2018

Towards the fabrication of the top-contact electrode in molecular junctions by photoreduction of a metal precursor

scientific article

Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

Use of sequential infiltration synthesis to improve the pattern transfer of PS-b-PLA DSA (Conference Presentation)

V-groove plasmonic waveguides fabricated by nanoimprint lithography

VHF CMOS-MEMS resonator monolithically integrated in a standard 0.35μm CMOS technology

Vertically aligned multi-walled carbon nanotube growth on platinum electrodes for bio-impedance applications

Voltage modulation scanned probe oxidation

Workshop summary report :