Nanopatterning by AFM nano-oxidation of thin aluminum layers as a tool for the prototyping of nanoelectromechanical systems
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| Description | scholarly article published 29 April 2003 |
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author: Josep Maria Montserrat Gabriel Abadal Anja Boisen Josep Montserrat Francesc Pérez-Murano |
| Publication date | April 29, 2003 |
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