Nanomechanical Mass Sensor for Spatially Resolved Ultrasensitive Monitoring of Deposition Rates in Stencil Lithography
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| Description | scientific article published on 01 February 2009 |
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author: Gabriel Abadal Arantxa Uranga Nuria Barniol Francesc Pérez-Murano Marc Sansa |
| Publication date | February 1, 2009 |
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