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AFM lithography for the definition of nanometre scale gaps: application to the fabrication of a cantilever-based sensor with electrochemical current detection

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author: Josep Maria Montserrat  Jaume Esteve  Anja Boisen  María Villarroya Gaudó  Josep Montserrat  Francesc Pérez-Murano 

Publication date April 17, 2004
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