Missing/wrong data? Edit Wikidata item
Electron- and ion-beam lithography for the fabrication of nanomechanical devices integrated on CMOS circuits
Author/s
Work details
Publication date:
April 2009
Copyright status
Copyright status information is not available for this work. The copyright status depends on the jurisdiction, the author's date of death and the date the work was created or published.
To learn more about copyright terms in different countries, visit the countries and terms page.