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Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution

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Description scientific article published on 18 March 2015
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author: Gabriel Abadal  Marta Fernandez-Regulez  Jordi Llobet  Alvaro San Paulo  Nuria Barniol  Francesc Torres  Francesc Pérez-Murano  Marc Sansa 

Publication date March 18, 2015
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