On the assessment by grazing-incidence small-angle X-ray scattering of replica quality in polymer gratings fabricated by nanoimprint lithography
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author: Esther Rebollar Daniel E Martínez-Tong Nerea Alayo Michelina Soccio Ignacio Martín-Fabiani Tiberio A. Ezquerra Francesc Pérez-Murano Mari Cruz García-Gutiérrez |
| Publication date | March 19, 2014 |
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