Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit
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| Description | article by J. Verd et al published June 2005 in IEEE Journal of Microelectromechanical Systems |
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author: Gabriel Abadal Jaume Esteve Nuria Barniol Francesca Campabadal Anja Boisen Francesc Pérez-Murano |
| Publication date | June 2005 |
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