Analysis of ALD-processed thin films by ion-beam techniques

scientific article

Antibacterial and barrier properties of oriented polymer films with ZnO thin films applied with atomic layer deposition at low temperatures

Atomic layer deposition and characterization of biocompatible hydroxyapatite thin films

Atomic layer deposition of Ti-Nb-O thin films onto electrospun fibers for fibrous and tubular catalyst support structures

Atomic layer deposition of lithium containing thin films

Atomic layer deposition of polyimide thin films

Atomic layer deposition of rare earth oxides: erbium oxide thin films from β-diketonate and ozone precursors

article published in 2004

Atomic layer deposition of ytterbium oxide using -diketonate and ozone precursors

Conformal transparent conducting oxides on black silicon

scientific article published on 01 November 2010

Controlled growth of HfO2 thin films by atomic layer deposition from cyclopentadienyl-type precursor and water

article published in 2005

Deposition of yttria-stabilized zirconia thin films by atomic layer epitaxy from β-diketonate and organometallic precursors

Effect of ozone concentration on silicon surface passivation by atomic layer deposited Al 2 O 3

Enhanced growth rate in atomic layer epitaxy deposition of magnesium oxide thin films

scholarly article by Matti Putkonen et al published 2000 in Journal of Materials Chemistry

Excellent silicon surface passivation using dimethylaluminium chloride as Al source for atomic layer deposited Al2O3

Gadolinium oxide thin films by atomic layer deposition

HfO[sub 2] Films Grown by ALD Using Cyclopentadienyl-Type Precursors and H[sub 2]O or O[sub 3] as Oxygen Source

scientific article

High Growth Rate of Erbium Oxide Thin Films in Atomic Layer Deposition from (CpMe)3Er and Water Precursors

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In situ quadrupole mass spectrometry study of atomic-layer deposition of ZrO2 using Cp2Zr(CH3)2 and water

scientific article published on 01 August 2005

Influence of titanium-substrate roughness on Ca–P–O thin films grown by atomic layer deposition

scholarly article by A.R. Ananda Sagari et al published March 2013 in Thin Solid Films

Ion-sputtering deposition of Ca–P–O films for microscopic imaging of osteoblast cells

Iridium-coated micropore x-ray optics using dry etching of a silicon wafer and atomic layer deposition.

scientific article

Low-Temperature Molecular Layer Deposition Using Monofunctional Aromatic Precursors and Ozone-Based Ring-Opening Reactions.

scientific article

Low-temperature atomic layer deposition of SiO2/Al2O3 multilayer structures constructed on self-standing films of cellulose nanofibrils

scientific article published in February 2018

Properties of AlN grown by plasma enhanced atomic layer deposition

Structural and Optical Characterization of ZnS Ultrathin Films Prepared by Low-Temperature ALD from Diethylzinc and 1.5-Pentanedithiol after Various Annealing Treatments

scientific article published on 30 September 2019

Surface-controlled growth of LaAlO3 thin films by atomic layer epitaxy

Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors

Time-Dependent Behavior of Cation Transport through Cellulose Acetate-Cationic Polyelectrolyte Membranes

Wettability and compositional analysis of hydroxyapatite films modified by low and high energy ion irradiation

article

ZrO2 Thin Films Grown on Silicon Substrates by Atomic Layer Deposition with Cp2Zr(CH3)2 and Water as Precursors