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Influence of titanium-substrate roughness on Ca–P–O thin films grown by atomic layer deposition

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Description scholarly article by A.R. Ananda Sagari et al published March 2013 in Thin Solid Films
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author: Timo Sajavaara  Jari Malm  Matti Putkonen  Mikko Laitinen  Harry J Whitlow  A.R. Ananda Sagari  Paavo Rahkila  Maarit Karppinen 

Publication date March 2013
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