In situ quadrupole mass spectrometry study of atomic-layer deposition of ZrO2 using Cp2Zr(CH3)2 and water
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| Description | scientific article published on 01 August 2005 |
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author: Matti Putkonen Mikko Ritala Antti Rahtu Markku Leskela |
| Publication date | August 1, 2005 |
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