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HfO[sub 2] Films Grown by ALD Using Cyclopentadienyl-Type Precursors and H[sub 2]O or O[sub 3] as Oxygen Source

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author: Timo Sajavaara  Matti Putkonen  Mikko Ritala  Kaupo Kukli  Kai Arstila  Markku Leskela 

Publication date 2006
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