Properties of AlN grown by plasma enhanced atomic layer deposition
| Image |  |
|---|---|
| Description | |
| Author/s |
author: Timo Sajavaara Matti Putkonen Mikko Laitinen Harri Lipsanen Markus Bosund Teppo Huhtio |
| Publication date | June 2011 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |