Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
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author: Timo Sajavaara Matti Putkonen Riikka L. Puurunen Simo-Pekka Hannula Sakari Sintonen Oili M.E. Ylivaara Harri Lipsanen Saima Ali |
| Publication date | May 2014 |
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