List of works - Riikka L. Puurunen

(Invited) Learnings from an Open Science Effort: Virtual Project on the History of ALD

A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy

Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion

scholarly article by Oili M.E. Ylivaara et al published February 2014 in Thin Solid Films

Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties

scholarly article by Oili M. E. Ylivaara et al published January 2017 in Journal of Vacuum Science & Technology A

Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films

article

Controlling the Crystallinity and Roughness of Atomic Layer Deposited Titanium Dioxide Films

scientific article published on 01 September 2011

Conversion of furfural to 2-methylfuran over CuNi catalysts supported on biobased carbon foams

scientific article

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

scientific article (publication date: 14 January 2013)

Grazing incidence-X-ray fluorescence spectrometry for the compositional analysis of nanometer-thin high-kappa dielectric HfO2 layers.

scientific article published on July 2005

Hydrodeoxygenation of Propylphenols on a Niobia‐Supported Platinum Catalyst: Ortho, Meta, Para Isomerism, Reaction Conditions, and Phase Equilibria

scientific article published in 2020

Learnings from an Open Science Effort: Virtual Project on the History of ALD

Mechanical and optical properties of as-grown and thermally annealed titanium dioxide from titanium tetrachloride and water by atomic layer deposition

scientific article

Microscratch testing method for systematic evaluation of the adhesion of atomic layer deposited thin films on silicon

scientific article

Nanotribological, nanomechanical and interfacial characterization of atomic layer deposited TiO2 on a silicon substrate

Nickel Supported on Mesoporous Zirconium Oxide by Atomic Layer Deposition: Initial Fixed-Bed Reactor Study

scholarly article published 5 December 2018

Nucleation and Conformality of Iridium and Iridium Oxide Thin Films Grown by Atomic Layer Deposition.

scientific article published on 27 September 2016

Preparation of silica-supported cobalt catalysts through chemisorption of cobalt(ii) and cobalt(iii) acetylacetonate

scholarly article by Aimo Rautiainen et al published 9 May 2002 in Physical Chemistry Chemical Physics

Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”

article published in 2017

Saturation profile based conformality analysis for atomic layer deposition: aluminum oxide in lateral high-aspect-ratio channels

scientific article published on 07 October 2020

Study of Ni, Pt, and Ru Catalysts on Wood-based Activated Carbon Supports and their Activity in Furfural Conversion to 2-Methylfuran

scientific article

Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process

scientific article (publication date: 15 June 2005)

Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors

Thermal conductivity of amorphous Al2O3/TiO2 nanolaminates deposited by atomic layer deposition.

scientific article published on 27 September 2016

ToF-SIMS 3D Analysis of Thin Films Deposited in High Aspect Ratio Structures via Atomic Layer Deposition and Chemical Vapor Deposition

scientific article published on 19 July 2019

List of works by Riikka L. Puurunen

(Invited) Learnings from an Open Science Effort: Virtual Project on the History of ALD

A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy

Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion

Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties

Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films

Controlling the Crystallinity and Roughness of Atomic Layer Deposited Titanium Dioxide Films

Conversion of furfural to 2-methylfuran over CuNi catalysts supported on biobased carbon foams

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

Grazing incidence-X-ray fluorescence spectrometry for the compositional analysis of nanometer-thin high-kappa dielectric HfO2 layers.

Hydrodeoxygenation of Propylphenols on a Niobia‐Supported Platinum Catalyst: <i>Ortho</i>, <i>Meta</i>, <i>Para</i> Isomerism, Reaction Conditions, and Phase Equilibria

Learnings from an Open Science Effort: Virtual Project on the History of ALD

Mechanical and optical properties of as-grown and thermally annealed titanium dioxide from titanium tetrachloride and water by atomic layer deposition

Microscratch testing method for systematic evaluation of the adhesion of atomic layer deposited thin films on silicon

Nanotribological, nanomechanical and interfacial characterization of atomic layer deposited TiO2 on a silicon substrate

Nickel Supported on Mesoporous Zirconium Oxide by Atomic Layer Deposition: Initial Fixed-Bed Reactor Study

Nucleation and Conformality of Iridium and Iridium Oxide Thin Films Grown by Atomic Layer Deposition.

Preparation of silica-supported cobalt catalysts through chemisorption of cobalt(ii) and cobalt(iii) acetylacetonate

Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”

Saturation profile based conformality analysis for atomic layer deposition: aluminum oxide in lateral high-aspect-ratio channels

Study of Ni, Pt, and Ru Catalysts on Wood-based Activated Carbon Supports and their Activity in Furfural Conversion to 2-Methylfuran

Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process

Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors

Thermal conductivity of amorphous Al2O3/TiO2 nanolaminates deposited by atomic layer deposition.

ToF-SIMS 3D Analysis of Thin Films Deposited in High Aspect Ratio Structures via Atomic Layer Deposition and Chemical Vapor Deposition

Tribological properties of thin films made by atomic layer deposition sliding against silicon

X-ray reflectivity characterization of atomic layer deposition Al2O3/TiO2 nanolaminates with ultrathin bilayers