Nanotribological, nanomechanical and interfacial characterization of atomic layer deposited TiO2 on a silicon substrate
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author: Timo Sajavaara Jussi Lyytinen Riikka L. Puurunen Sakari Sintonen Oili M.E. Ylivaara Harri Lipsanen Jaakko Julin Ajai Iyer Saima Ali |
| Publication date | November 2015 |
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