Controlling the Crystallinity and Roughness of Atomic Layer Deposited Titanium Dioxide Films
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| Description | scientific article published on 01 September 2011 |
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author: Timo Sajavaara Riikka L. Puurunen Mikko Laitinen Ville Miikkulainen Eero Santala Markku Leskela |
| Publication date | September 1, 2011 |
| Language | English |
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