Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties
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| Description | scholarly article by Oili M. E. Ylivaara et al published January 2017 in Journal of Vacuum Science & Technology A |
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author: Helena Ronkainen Timo Sajavaara Riikka L. Puurunen Mikko Laitinen Simo-Pekka Hannula Eero Haimi Harri Lipsanen Jaakko Julin Saima Ali |
| Publication date | January 2017 |
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