12E-1 Accelerometer Based on Thin-Film Bulk Acoustic Wave Resonators

A novel embryo identification system by direct tagging of mouse embryos using silicon-based barcodes

scientific article published on 18 November 2010

A platform for monolithic CMOS-MEMS integration on SOI wafers

A read-out strategy and circuit design for high frequency MEMS resonators

AFM lithography for the definition of nanometre scale gaps: application to the fabrication of a cantilever-based sensor with electrochemical current detection

Analysis of buried etch-stop layers in silicon by nitrogen-ion implantation

Analytical and Finite-Element Modeling of Localized-Mass Sensitivity of Thin-Film Bulk Acoustic-Wave Resonators (FBAR)

Analytical and finite-element modeling of a localized-mass sensor

Anisotropic etch-stop properties of nitrogen-implanted silicon

Automated on-wafer characterization in micro-machined resonators: towards an integrated test vehicle for bulk acoustic wave resonators (FBAR)

Automated on-wafer extraction of equivalent-circuit parameters in thin-film bulk acoustic wave resonators and substrate

Band-pass transimpedance read-out circuit for UHF MEMS resonator applications

Barcode tagging of human oocytes and embryos to prevent mix-ups in assisted reproduction technologies.

scientific article

CMOS degradation effects due to electron beam lithography in smart NEMS fabrication

CMOS-SOI platform for monolithic integration of crystalline silicon MEMS

Chemical functionalization of polysilicon microparticles for single-cell studies.

scientific article

Design and characterization of a magnetic digital flow regulator

Design and fabrication of Si technology miicrogenerators for vibrational energy scavenging

Design and implementation of mechanical resonators for optimized inertial electromagnetic microgenerators

Design and implementation of mechanical resonators for optimized inertial electromagnetic microgenerators

Design of a microinductive device integrated within a simple resonant diferential filter for high sensitivity portable biodetectors

Design, fabrication and characterization of an externally actuated ON/OFF microvalve

Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit

article by J. Verd et al published June 2005 in IEEE Journal of Microelectromechanical Systems

Directed fracture for the fabrication of free-standing multilayered submicrometer structures

scientific article published on 24 January 2011

Electrical detection of multiple resonant modes in a CMOS–MEMS cantilever

Electrochemical deposition of Cu and Ni/Cu multilayers in Si Microsystem Technologies

Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection

article

Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist

article published in 2004

Fabrication of nanogaps for MEMS prototyping using focused ion beam as a lithographic tool and reactive ion etching pattern transfer

Focus ion beam micromachined glass pipettes for cell microinjection

scientific article

Focused-Ion-Beam-Assisted Magnet Fabrication and Manipulation for Magnetic Field Detection Applications

scientific article published on 01 March 2009

Focused-ion-beam-assisted tuning of thin-film bulk acoustic wave resonators (FBARs)

From VHF to UHF CMOS-MEMS monolithically integrated resonators

Fully CMOS integrated low voltage 100 MHz MEMS resonator

Fully integrated MIXLER based on VHF CMOS-MEMS clamped-clamped beam resonator

Geochemical and mineralogical characterization of surficial sediments from the Northern Rias: Implications for sediment provenance and impact of the source rocks

article by Patricia Bernárdez et al published January 2012 in Marine Geology

High-frequency sensor technologies for inertial force detection based on thin-film bulk acoustic wave resonators (FBAR)

High-sensitivity capacitive readout system for resonant submicrometer-scale cantilevers based sensors

Instantaneous de-embedding of the on-wafer equivalent-circuit parameters of acoustic resonator (FBAR) for integrated circuit applications

Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications

Integration of NEMS resonators in a 65nm CMOS technology

Integration of piezoelectric energy scavengers with FBAR resonators for the miniaturization of autonomous wireless sensors nodes

Internalization and cytotoxicity analysis of silicon-based microparticles in macrophages and embryos

scientific article

Intracellular Silicon Chips in Living Cells

Intracellular polysilicon barcodes for cell tracking

scientific article published in November 2009

Large-signal model of a resonating cantilever-based transducer for system level electrical simulation

Linear and non linear behavior of mechanical resonators for optimized inertial electromagnetic microgenerators

Linear and non-linear behavior of mechanical resonators for optimized inertial electromagnetic microgenerators

Localised Actuation in Composites Containing Carbon Nanotubes and Liquid Crystalline Elastomers

scientific article published on 25 October 2011

Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators

Localized-mass detection based on thin-film bulk acoustic wave resonators (FBAR): Area and mass location aspects

MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing (Invited Paper)

article

Magnetically actuated microvalve for disposable drug infusor

Micro-barcodes for biological applications

Microinductive Signal Conditioning With Resonant Differential Filters: High-Sensitivity Biodetection Applications

Monolithic 0.35-μm CMOS Cantilever for Mass Sensing in the Attogram Range with Self-Excitation

Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range

article published in 2008

Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry

scholarly article by Z.J. Davis et al published August 2003 in Sensors and Actuators A

Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions

Nanocantilever based mass sensor integrated with CMOS circuitry

Nanocantilevers with integrated CMOS: effects of electron beam lithography on NMOS transistors

article

Nanomagnets with high shape anisotropy and strong crystalline anisotropy: perspectives on magnetic force microscopy

scientific article published on 23 November 2011

Nanometer scale gaps for capacitive transduction improvement on RF-MEMS resonators

Nanoscale imaging of buried topological defects with quantitative X-ray magnetic microscopy

scientific article published on 4 September 2015

Novel optimized design of a piezoelectric energy harvester in a package for low amplitude vibrations

article

P2K-2 Sensitivity Considerations in Localized Mass Detection Based on Thin-Film Bulk Acoustic Wave Resonators

Parasitic effect on silicon MEMS resonator model parameters

Protection of MOS capacitors during anodic bonding

Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography

SOI-silicon as structural layer for NEMS applications

Sensor based on arrays of sub-micrometer scale resonant silicon cantilevers integrated monolithically with CMOS circuitry

Sharpened transparent micronozzle fabrication for cell membrane piercing

Si technology based microinductive devices for biodetection applications

SiNERGY, a project on energy harvesting and microstorage empowered by Silicon technologies

Silicon Microdevice for Emulsion Production Using Three-Dimensional Flow Focusing

Silicon chips detect intracellular pressure changes in living cells.

scientific article published on 30 June 2013

Silicon-nanowire based attachment of silicon chips for mouse embryo labelling

scientific article

Structural characterisation of nitrogen ion implantation into silicon for sensor technology

Suspended Planar-Array Chips for Molecular Multiplexing at the Microscale

scientific article published on 9 December 2015

Suspended Silicon Microphotodiodes for Electrochemical and Biological Applications

scientific article

System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection

Tactile acuity charts: a reliable measure of spatial acuity

scientific article

Technological development of intracellular polysilicon–chromium–gold chips for orthogonal chemical functionalization

Thin-Film Bulk Acoustic Wave Resonator Floating Above CMOS Substrate

Time-Resolved Evaporation Rate of Attoliter Glycerine Drops Using On-Chip CMOS Mass Sensors Based on Resonant Silicon Micro Cantilevers

Towards a Microsytem of Multiple Production of Micro-Drops Manufactured on Silicon

Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

Vibrational energy scavenging with Si technology electromagnetic inertial microgenerators

Zero-level packaging of MEMS in standard CMOS technology

ac capacitance and conductance measurements of two‐terminal metal‐oxide‐semiconductor‐oxide‐semiconductor capacitors on silicon‐on‐insulator substrates