Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry
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| Description | scholarly article by Z.J. Davis et al published August 2003 in Sensors and Actuators A |
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author: Gabriel Abadal Jaume Esteve Nuria Barniol Francesca Campabadal Anja Boisen Ole Hansen |
| Publication date | August 2003 |
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