Nanometer scale gaps for capacitive transduction improvement on RF-MEMS resonators
| Image |  |
|---|---|
| Description | |
| Author/s |
author: Gabriel Abadal Jaume Esteve Nuria Barniol Francesc Torres Josep Montserrat |
| Publication date | May 2007 |
| Language | |
| Country of origin | |
| Wikipedia link | |
| Copyright status | |
| Missing/wrong data? | Edit Wikidata item |