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List of works by Marko Vehkamäki

Atomic Layer Deposition of Rhenium Disulfide

scientific article published on 5 January 2018

Atomic Layer Deposition of Strontium Tantalate Thin Films from Bimetallic Precursors and Water

Atomic layer deposition and characterization of Bi₂Te₃ thin films

scientific article published on 21 August 2014

Bismuth precursors for atomic layer deposition of bismuth-containing oxide films

scholarly article by Marko Vehkamäki et al published 2004 in Journal of Materials Chemistry

Combining focused ion beam and atomic layer deposition in nanostructure fabrication

scientific article published on 20 February 2014

Corrosion Protection of Steel with Oxide Nanolaminates Grown by Atomic Layer Deposition

Evaluating optimal combination of clodronate and bioactive glass for dental application

scientific article published on 12 April 2014

Magnetic Properties of Polycrystalline Bismuth Ferrite Thin Films Grown by Atomic Layer Deposition

scientific article published on 04 December 2014

Metal oxide multilayer hard mask system for 3D nanofabrication

scientific article published on 7 December 2017

Rhenium Metal and Rhenium Nitride Thin Films Grown by Atomic Layer Deposition

scientific article published on 27 August 2018

Sealing of hard CrN and DLC coatings with atomic layer deposition

scientific article published on 27 January 2014

Selective etching of focused gallium ion beam implanted regions from silicon as a nanofabrication method

scientific article published on 11 June 2015

Studies on atomic layer deposition of IRMOF-8 thin films

Study of bismuth alkoxides as possible precursors for ALD.

scientific article published on 16 February 2010

Surface modification of acetaminophen particles by atomic layer deposition.

scientific article published on 18 April 2017

Synthesis and characterisation of cyclopentadienyl complexes of barium: precursors for atomic layer deposition of BaTiO3.

scientific article

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