Rhenium Metal and Rhenium Nitride Thin Films Grown by Atomic Layer Deposition
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| Description | scientific article published on 27 August 2018 |
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author: Mikko Ritala Kenichiro Mizohata Miika Mattinen Marko Vehkamäki Jyrki Räisänen Jani Hämäläinen Kristoffer Meinander Markku Leskela |
| Publication date | August 27, 2018 |
| Language | English |
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