Selective etching of focused gallium ion beam implanted regions from silicon as a nanofabrication method
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| Description | scientific article published on 11 June 2015 |
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author: Mikko Ritala Kenichiro Mizohata Miika Mattinen Marko Vehkamäki Zhongmei Han Markku Leskela |
| Publication date | June 11, 2015 |
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