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Atomic layer deposition and characterization of Bi₂Te₃ thin films

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Description scientific article published on 21 August 2014
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author: Mikko Ritala  Kenichiro Mizohata  Miika Mattinen  Marko Vehkamäki  Timo Hatanpää  Esa Puukilainen  Tiina Sarnet  Markku Leskela 

Publication date August 21, 2014
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