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List of works by Philip J. Tobin

Evaluation of a Praseodymium Precursor for Atomic Layer Deposition of Oxide Dielectric Films

scholarly article by Kaupo Kukli et al published November 2004 in Chemistry of Materials

Hafnium silicon oxide films prepared by atomic layer deposition

scholarly article by Kaupo Kukli et al published June 2004 in Materials Science and Engineering B: Advanced Functional Solid-state Materials

Properties of Oxide Film Atomic Layer Deposited from Tetraethoxy Silane, Hafnium Halides, and Water

scholarly article by Kaupo Kukli et al published 2004 in Journal of the Electrochemical Society

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