Evaluation of a Praseodymium Precursor for Atomic Layer Deposition of Oxide Dielectric Films
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| Description | scholarly article by Kaupo Kukli et al published November 2004 in Chemistry of Materials |
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author: Timo Sajavaara Mikko Ritala Kaupo Kukli Philip J. Tobin David Gilmer Markku Leskela |
| Publication date | November 2004 |
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