Hafnium silicon oxide films prepared by atomic layer deposition
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| Description | scholarly article by Kaupo Kukli et al published June 2004 in Materials Science and Engineering B: Advanced Functional Solid-state Materials |
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author: Timo Sajavaara Mikko Ritala Kaupo Kukli Philip J. Tobin David Gilmer Markku Leskela |
| Publication date | June 2004 |
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