A CMOS-MEMS filter using a V-coupler and electrical phase inversion

A CMOS–MEMS RF-Tunable Bandpass Filter Based on Two High- $Q$ 22-MHz Polysilicon Clamped-Clamped Beam Resonators

A Compact and Low-Power CMOS Circuit for Fully Integrated NEMS Resonators

A femtogram resolution mass sensor platform based on SOI electrostatically driven resonant cantilever. Part II: Sensor calibration and glycerine evaporation rate measurement

scientific article published on 18 April 2006

A femtogram resolution mass sensor platform, based on SOI electrostatically driven resonant cantilever. Part I: Electromechanical model and parameter extraction

scientific article published on 18 April 2006

A monolithically integrated torsional CMOS-MEMS relay

CMOS Cantilever-based Oscillator for Attogram Mass Sensing

Characterization of CMOS-MEMS resonator by pulsed mode electrostatic actuation

Compact CMOS current conveyor for integrated NEMS resonators

Cross coupled beams CMOS–MEMS resonator for VHF range with enhanced electrostatic detection

article published in 2011

Dynamic Properties of Three-Terminal Tungsten CMOS-NEM Relays Under Nonlinear Tapping Mode

Electrical detection of multiple resonant modes in a CMOS–MEMS cantilever

Electrically Enhanced Readout System for a High-Frequency CMOS-MEMS Resonator

Electrochemical synthesis of nanoparticles of magnetic mixed oxides of Sr-Fe and Sr-Co-Fe.

scientific article published in December 2001

Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors

scientific article published on 13 October 2016

Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry

Fabrication of highly regular suspended graphene nanoribbons through a one-step electron beam lithography process

Fully CMOS integrated bandpass filter based on mechanical coupling of two RF MEMS resonators

Fully CMOS integrated low voltage 100 MHz MEMS resonator

Fully integrated MIXLER based on VHF CMOS-MEMS clamped-clamped beam resonator

Harvester-on-chip: Design of a proof of concept prototype

Inducing bistability with local electret technology in a microcantilever based non-linear vibration energy harvester

article

Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications

Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies

article published in 2008

Linear operation of a 11MHz CMOS-MEMS resonator

Mixing in a 220MHz CMOS-MEMS

Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range

article published in 2008

Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions

Monolithically Integrated Double-Ended Tuning Fork- Based Oscillator with Low Bias Voltage in Air Conditions

article

Multi-Frequency Resonance Behaviour of a Si FractalNEMS Resonator

scientific article published on 23 April 2020

Nanometer scale gaps for capacitive transduction improvement on RF-MEMS resonators

Optimization of the Close-to-Carrier Phase Noise in a CMOS-MEMS Oscillator Using a Phase Tunable Sustaining-Amplifier

scientific article

Phase-Noise Reduction in a CMOS-MEMS Oscillator Under Nonlinear MEMS Operation

Proposal for measurement of repulsive Casimir forces using silicon membranes

Single-Resonator Dual-Frequency BEOL-Embedded CMOS-MEMS Oscillator With Low-Power and Ultra-Compact TIA Core

Storing Deformation Energy of ZnO fine wires in a Mechanical Battery

Suppression of the A-f-mediated noise at the top bifurcation point in a MEMS resonator with both hardening and softening hysteretic cycles

The influence of the parasitic current on the nonlinear electrical response of capacitively sensed cantilever resonators

Third-mode 48MHz free–free beam resonator used as a RF balun

Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution

scientific article published on 18 March 2015

VHF band-pass filter based on a single CMOS-MEMS doubleended tuning fork resonator

Vibration energy harvesting via parametrically-induced bistability

article

Zero-level packaging of MEMS in standard CMOS technology