List of works - Markus Bosund - Paulina

List of works by Markus Bosund

Effect of atomic-layer-deposited AlN on near-surface InGaAs/GaAs structures

Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas

scholarly article by Alexander Pyymaki Perros et al published January 2012 in Journal of Vacuum Science & Technology A

Properties of AlN grown by plasma enhanced atomic layer deposition

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