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List of works by Joseph P. Klesko

Low Temperature, Selective Atomic Layer Deposition of Nickel Metal Thin Films.

scientific article published on 9 April 2018

Selective Growth of Interface Layers from Reactions of Sc(MeCp)2(Me2pz) with Oxide Substrates

scientific article published on 13 September 2018

Substrate selectivity in the low temperature atomic layer deposition of cobalt metal films from bis(1,4-di-tert-butyl-1,3-diazadienyl)cobalt and formic acid

scientific article published in February 2017

Thermal Atomic Layer Etching of Silica and Alumina Thin Films Using Trimethylaluminum with Hydrogen Fluoride or Fluoroform

scientific article published on 04 September 2018

Unusual stoichiometry control in the atomic layer deposition of manganese borate films from manganese bis(tris(pyrazolyl)borate) and ozone

article

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