A CMOS–MEMS RF-Tunable Bandpass Filter Based on Two High- $Q$ 22-MHz Polysilicon Clamped-Clamped Beam Resonators

An integrated implantable electrical sacral root stimulator for bladder control.

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Analytical and Finite-Element Modeling of Localized-Mass Sensitivity of Thin-Film Bulk Acoustic-Wave Resonators (FBAR)

Analytical and finite-element modeling of a localized-mass sensor

Automated on-wafer characterization in micro-machined resonators: towards an integrated test vehicle for bulk acoustic wave resonators (FBAR)

Automated on-wafer extraction of equivalent-circuit parameters in thin-film bulk acoustic wave resonators and substrate

Band-pass transimpedance read-out circuit for UHF MEMS resonator applications

CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology

Cancellation of the parasitic feedthrough current in an integrated CMOS–MEMS clamped-clamped beam resonator

Dynamic Properties of Three-Terminal Tungsten CMOS-NEM Relays Under Nonlinear Tapping Mode

Electrically Enhanced Readout System for a High-Frequency CMOS-MEMS Resonator

Electrode–Tissue Impedance Measurement CMOS ASIC for Functional Electrical Stimulation Neuroprostheses

Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors

scientific article published on 13 October 2016

Focused-ion-beam-assisted tuning of thin-film bulk acoustic wave resonators (FBARs)

High Performance Seesaw Torsional CMOS-MEMS Relay Using Tungsten VIA Layer

scientific article published on 07 November 2018

High-frequency sensor technologies for inertial force detection based on thin-film bulk acoustic wave resonators (FBAR)

Instantaneous de-embedding of the on-wafer equivalent-circuit parameters of acoustic resonator (FBAR) for integrated circuit applications

Intrinsic feedthrough current cancellation in a seesaw CMOS-MEMS resonator for integrated oscillators

Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators

Localized-mass detection based on thin-film bulk acoustic wave resonators (FBAR): Area and mass location aspects

Miniaturized 0.13-μm CMOS Front-End Analog for AlN PMUT Arrays

scientific article published on 22 February 2020

Multi-cantilever Oscillator

NEMS/CMOS sensor for monitoring deposition rates in stencil lithography

Nanomechanical Mass Sensor for Spatially Resolved Ultrasensitive Monitoring of Deposition Rates in Stencil Lithography

scientific article published on 01 February 2009

Nanomechanical mass sensor for monitoring deposition rates through confined apertures

Nanomechanical test structure for optimal alignment in stencil-based lithography

Phase-Noise Reduction in a CMOS-MEMS Oscillator Under Nonlinear MEMS Operation

Single-Resonator Dual-Frequency BEOL-Embedded CMOS-MEMS Oscillator With Low-Power and Ultra-Compact TIA Core

Suppression of the A-f-mediated noise at the top bifurcation point in a MEMS resonator with both hardening and softening hysteretic cycles

System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection

Temperature-drift rejection and sensitivity to mismatch of synchronized strongly-coupled M/NEMS resonators

Thin-Film Bulk Acoustic Wave Resonator Floating Above CMOS Substrate

Time-Resolved Evaporation Rate of Attoliter Glycerine Drops Using On-Chip CMOS Mass Sensors Based on Resonant Silicon Micro Cantilevers

Top-Down CMOS-NEMS Polysilicon Nanowire with Piezoresistive Transduction

scientific article published on 14 July 2015