List of works - Zhongmei Han - Paulina

List of works by Zhongmei Han

Combining focused ion beam and atomic layer deposition in nanostructure fabrication

scientific article published on 20 February 2014

Metal oxide multilayer hard mask system for 3D nanofabrication

scientific article published on 7 December 2017

Selective etching of focused gallium ion beam implanted regions from silicon as a nanofabrication method

scientific article published on 11 June 2015

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