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List of works by Reinhard Voelkel

Advanced mask aligner lithography: fabrication of periodic patterns using pinhole array mask and Talbot effect ⬇️

scientific article published on September 13, 2010

Advanced mask aligner lithography: new illumination system

scientific article published on 01 September 2010

Computational rule-based approach for corner correction of non-Manhattan geometries in mask aligner photolithography

scientific article published on 01 October 2019

Fabrication and characterization of linear diffusers based on concave micro lens arrays

scientific article

Flexible beam shaping system using fly's eye condenser

scientific article published on 01 April 2010

Improvements on the uniformity of large-area microlens arrays in Fused Silica

scientific article published on 01 March 2019

Mask-aligner lithography using a continuous-wave diode laser frequency-quadrupled to 193 nm.

scientific article published in January 2018

Optical characterization of high numerical aperture microlenses for quality assessment and fabrication process optimization

scientific article published on 01 April 2020

Printing sub-micron structures using Talbot mask-aligner lithography with a 193 nm CW laser light source

scientific article published on 01 August 2018

Refraction limit of miniaturized optical systems: a ball-lens example

scientific article published on 01 April 2016

Tolerancing the surface form of aspheric microlenses manufactured by wafer-level optics techniques

scientific article published on 01 May 2020

Two step process for the fabrication of diffraction limited concave microlens arrays

scientific article published on 01 November 2008

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