List of works - Antti Rahtu - Paulina

List of works by Antti Rahtu

Effect of water dose on the atomic layer deposition rate of oxide thin films

In situ quadrupole mass spectrometry study of atomic-layer deposition of ZrO2 using Cp2Zr(CH3)2 and water

scientific article published on 01 August 2005

Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films

article published in 2005

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