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List of works by Petra Alén

ALD of Ta(Si)N Thin Films Using TDMAS as a Reducing Agent and as a Si Precursor

Atomic Layer Deposition of Molybdenum Nitride Thin Films for Cu Metallizations

scientific article

Atomic Layer Deposition of Titanium Nitride Thin Films Using tert-Butylamine and Allylamine as Reductive Nitrogen Sources

scholarly article by Marika Juppo et al published 2002 in Electrochemical and Solid-State Letters

The growth and diffusion barrier properties of atomic layer deposited NbNx thin films

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