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Atomic Layer Deposition of Titanium Nitride Thin Films Using tert-Butylamine and Allylamine as Reductive Nitrogen Sources

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Description scholarly article by Marika Juppo et al published 2002 in Electrochemical and Solid-State Letters
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author: Timo Sajavaara  Mikko Ritala  Petra Alén  Markku Leskela 

Publication date 2002
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