Atomic Layer Deposition of Titanium Nitride Thin Films Using tert-Butylamine and Allylamine as Reductive Nitrogen Sources
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| Description | scholarly article by Marika Juppo et al published 2002 in Electrochemical and Solid-State Letters |
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author: Timo Sajavaara Mikko Ritala Petra Alén Markku Leskela |
| Publication date | 2002 |
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