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List of works by Eero Haimi

Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion

scholarly article by Oili M.E. Ylivaara et al published February 2014 in Thin Solid Films

Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties

scholarly article by Oili M. E. Ylivaara et al published January 2017 in Journal of Vacuum Science & Technology A

Saturation profile based conformality analysis for atomic layer deposition: aluminum oxide in lateral high-aspect-ratio channels

scientific article published on 07 October 2020

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