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List of works by Ying Liu

Alignment method combining interference lithography with anisotropic wet etch technique for fabrication of high aspect ratio silicon gratings

scientific article published on 01 September 2014

Alignment method for fabricating a parallel flat-field grating used in soft x-ray region

scientific article published on 01 June 2015

Chemical mechanical polishing to improve the efficiency uniformity of beam sampling grating

scientific article published on 01 February 2014

Design of multi-area grating for soft x-ray flat-field spectrograph

scientific article published on 01 June 2015

Fabrication of varied-line-spacing grating by elastic medium

scientific article published on 01 August 2004

Nanostructures on fused silica surfaces produced by ion beam sputtering with Al co-deposition

Reducing Rowland ghosts in diffraction gratings by dynamic exposure near-field holography

scientific article published in February 2018

Soft X-ray holographic grating beam splitter including a double frequency grating for interferometer pre-alignment

scientific article

Soft X-ray varied-line-spacing gratings fabricated by near-field holography using an electron beam lithography-written phase mask

scientific article published on 16 August 2019

Vacuum-ultraviolet blazed silicon grating anisotropically etched by native-oxide mask

scientific article published on 01 April 2009

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