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List of works by Kenneth A. Goldberg

A New Light for Berkeley Lab—the Advanced Light Source Upgrade

scientific article published on 2 January 2019

A broader view on EUV-masks: adding complementary imaging modes to the SHARP microscope

scientific article published on 8 October 2014

A method of image-based aberration metrology for EUVL tools

scientific article published on 16 March 2015

Aberration estimation using EUV mask roughness

scientific article published on 19 March 2015

Accelerating EUV learning with synchrotron light: mask roughness challenges ahead

scientific article published on 6 October 2011

Actinic mask imaging: recent results and future directions from the SHARP EUV microscope

scientific article published on 17 April 2014

Adaptive shape control of wavefront-preserving X-ray mirrors with active cooling and heating

scientific article published on 01 June 2020

Aerial imaging study of the mask-induced line-width roughness of EUV lithography masks

scientific article published on 18 March 2016

Amplitude versus phase effects in extreme ultraviolet lithography mask scattering and imaging.

scientific article

Analytic descriptions of parabolic X-ray mirrors

scientific article published in July 2022

Application of phase shift focus monitor in EUVL process control

scientific article published in April 2013

Beamline Optics and Modeling School (BLOMS) 2023

scientific article published on 3 September 2023

Binary Amplitude Reflection Gratings for X-ray Shearing and Hartmann Wavefront Sensors

scientific article published on 13 January 2021

Broader view on extreme ultraviolet masks: adding complementary imaging modes to the SHARP microscope

scientific article published on 23 February 2015

Collaborative development of diffraction-limited beamline optical systems at US DOE light sources

scientific article published on 9 September 2019

Commissioning an EUV mask microscope for lithography generations reaching 8 nm

scientific article published in April 2013

Compensation of heat load deformations using adaptive optics for the ALS upgrade: a wave optics study

scientific article published on 12 August 2020

Data-driven modeling and control of an X-ray bimorph adaptive mirror

scientific article published in January 2023

Demonstration of 22-nm half pitch resolution on the SHARP EUV microscope

scientific article published on 26 August 2015

Derivation of closed-form ellipsoidal X-ray mirror shapes from Fermat's principle

scientific article published in 2022

Design and demonstration of tunable soft x-ray lateral shearing and Hartmann wavefront sensors

scientific article published on 17 September 2018

Diaboloidal mirrors: algebraic solution and surface shape approximations

scientific article published in 2021

EUV Research at Berkeley Lab: Enabling Technologies and Applications

scientific article published on 20 September 2015

EUV actinic brightfield mask microscopy for predicting printed defect images

scientific article published on 3 November 2015

EUV mask multilayer defects and their printability under different multilayer deposition conditions

scientific article published on 29 March 2012

EUV photolithography mask inspection using Fourier ptychography

scientific article published on 29 May 2018

Electro-optical system for scanning microscopy of extreme ultraviolet masks with a high harmonic generation source

scientific article

Emulation of anamorphic imaging on the SHARP EUV mask microscope

scientific article published on 18 March 2016

Emulation of anamorphic imaging on the SHARP extreme ultraviolet mask microscope

scientific article published on 12 July 2016

Enabling EUV Resist Research at the 1x and Smaller Regime

scientific article published in 2015

Enhancing defect detection with Zernike phase contrast in EUV multilayer blank inspection

scientific article published on 16 March 2015

Evaluating printability of buried native EUV mask phase defects through a modeling and simulation approach

scientific article published on 16 March 2015

Evaluating printability of buried native extreme ultraviolet mask phase defects through a modeling and simulation approach

scientific article published on 15 May 2015

Ex situ tuning of bendable x-ray mirrors for optimal beamline performance

scientific article published on 15 October 2012

Examination of phase retrieval algorithms for patterned EUV mask metrology

scientific article published on 3 November 2015

Experimental measurements of telecentricity errors in high-numerical-aperture extreme ultraviolet mask images

scientific article published in November 2014

Experimental verification of high-NA imaging simulations using SHARP

scientific article published on 16 October 2020

Extreme ultraviolet mask roughness: requirements, characterization, and modeling

scientific article published on 28 July 2014

Extreme ultraviolet microscope characterization using photomask surface roughness

scientific article published on 15 July 2020

Field-varying aberration recovery in EUV microscopy using mask roughness

scientific article published in 2018

Gradient descent algorithm applied to wavefront retrieval from through-focus images by an extreme ultraviolet microscope with partially coherent source

scientific article published on December 2014

Image-based pupil plane characterization via a space-domain basis

scientific article published on 19 June 2017

Image-based pupil plane characterization via principal component analysis for EUVL tools

scientific article published on 18 March 2016

In situ fine tuning of bendable soft x-ray mirrors using a lateral shearing interferometer

scientific article published in May 2013

Increased depth of field through wave-front coding: using an off-axis zone plate lens with cubic phase modulation in an EUV microscope

scientific article published on 20 September 2013

Level-set multilayer growth model for predicting printability of buried native extreme ultraviolet mask defects

scientific article published on 24 February 2015

Mask blank defect printability comparison using optical and SEM mask and wafer inspection and bright field actinic mask imaging

scientific article published on 9 July 2015

Measurement of EUV lithography pupil amplitude and phase variation via image-based methodology

scientific article published on 28 June 2016

Measurement of through-focus EUV pattern shifts using the SHARP actinic microscope

scientific article published on 16 October 2017

Methodology for optimal in situ alignment and setting of bendable optics for diffraction-limited focusing of soft x-rays

scientific article published on 15 October 2012

Methodology for optimal in situ alignment and setting of bendable optics for nearly diffraction-limited focusing of soft x-rays

scientific article published on 14 March 2013

Modal wavefront reconstruction from its gradient

scientific article published on 17 April 2015

New techniques for the measurement of x-ray beam or x-ray optics quality

New ways of looking at masks with the SHARP EUV microscope

scientific article published on 16 March 2015

Off-axis aberration estimation in an EUV microscope using natural speckle

scientific article published in 2016

Off-axis representation of hyperbolic mirror shapes for X-ray beamlines

scientific article published in May 2023

Optical modeling of Fresnel zoneplate microscopes ⬇️

scientific article published on July 10, 2011

Optimized mirror shape tuning using beam weightings based on distance, angle of incidence, reflectivity, and power.

scientific article published in May 2016

Partially Coherent Quantitative Phase Retrieval for EUV Lithography

scientific article published in 2015

Phase measurements of EUV mask defects

scientific article published on 16 March 2015

Phase-enhanced defect sensitivity for EUV mask inspection

scientific article published on 8 October 2014

Preface: The 5th International Workshop on X-ray Mirror Design, Fabrication, and Metrology

scientific article

Printability of native blank defects and programmed defects and their stack structures

scientific article published on 6 October 2011

Printability study of pattern defects in the EUV mask as a function of hp nodes

scientific article published on 29 March 2012

Pseudo-gray-scale halftone gratings for shearing and Hartmann wavefront sensors

scientific article published on 3 February 2021

Pupil shaping and coherence control in an EUV mask-imaging microscope

scientific article published on 20 September 2013

Real-time machine-learning-driven control system of a deformable mirror for achieving aberration-free X-ray wavefronts

scientific article published on 9 June 2023

Recovering effective amplitude and phase roughness of EUV masks

scientific article published on 23 September 2013

Reflective binary amplitude grating for soft x-ray shearing and Hartmann wavefront sensing

scientific article published on 01 September 2020

Simulations of applications using diaboloid mirrors

scientific article published in June 2021

Taking a SHARP look at mask 3D effects

scientific article published on 27 October 2017

The SEMATECH high-NA actinic reticle review project (SHARP) EUV mask-imaging microscope

scientific article published on 20 September 2013

Thickness dependence of piezo-bimorph adaptive mirror bending

scientific article published in July 2023

Ultrahigh efficiency EUV contact-hole printing with chromeless phase shift mask

scientific article published on 10 May 2016

Upgrade to the SHARP EUV mask microscope

scientific article published on 26 March 2019

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