List of works - Xin Meng - Paulina

List of works by Xin Meng

Atomic Layer Deposition of Silicon Nitride Thin Films: A Review of Recent Progress, Challenges, and Outlooks.

scientific article

Hierarchical Porous Carbon Arising from Metal-Organic Framework-Encapsulated Bacteria and Its Energy Storage Potential

scientific article published on 25 February 2020

Hollow Cathode Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride Using Pentachlorodisilane

scientific article published on 17 March 2018

Investigation of the Physical Properties of Plasma Enhanced Atomic Layer Deposited Silicon Nitride as Etch Stopper

scientific article published on 11 December 2018

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