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List of works by Tadatomo Suga

Air-gap structure between integrated LiNbO3 optical modulators and micromachined Si substrates.

scientific article published in August 2011

Bonding of glass nanofluidic chips at room temperature by a one-step surface activation using an O2/CF4 plasma treatment.

scientific article published in March 2013

Comparison of Argon and Oxygen Plasma Treatments for Ambient Room-Temperature Wafer-Scale Au⁻Au Bonding Using Ultrathin Au Films

scientific article published on 13 February 2019

High Thermal Boundary Conductance across Bonded Heterogeneous GaN-SiC Interfaces

scientific article published on 28 August 2019

Interfacial Thermal Conductance across Room-Temperature-Bonded GaN/Diamond Interfaces for GaN-on-Diamond Devices

scientific article published on 10 February 2020

Low-temperature direct bonding of glass nanofluidic chips using a two-step plasma surface activation process

scientific article published on 03 December 2011

Moiré-Based Alignment Using Centrosymmetric Grating Marks for High-Precision Wafer Bonding.

scientific article published on 22 May 2019

Single-Crystalline 3C-SiC anodically Bonded onto Glass: An Excellent Platform for High-Temperature Electronics and Bioapplications

scientific article published on 9 August 2017

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