Search filters

Authors whose works are in public domain in at least one jurisdiction

List of works by Anders Hårsta

Effect of selected atomic layer deposition parameters on the structure and dielectric properties of hafnium oxide films

scholarly article by Kaupo Kukli et al published November 2004 in Journal of Applied Physics

Erratum: Effect of selected atomic layer deposition parameters on the structure and dielectric properties of hafnium oxide films [J. Appl. Phys. 96, 5298 (2004)]

scholarly article by Kaupo Kukli et al published May 2005 in Journal of Applied Physics

Hafnium tetraiodide and oxygen as precursors for atomic layer deposition of hafnium oxide thin films

scholarly article by Jaan Aarik et al published October 2002 in Thin Solid Films

Influence of thickness and growth temperature on the properties of zirconium oxide films grown by atomic layer deposition on silicon

scholarly article by Kaupo Kukli et al published May 2002 in Thin Solid Films

Properties of hafnium oxide films grown by atomic layer deposition from hafnium tetraiodide and oxygen

scholarly article by Kaupo Kukli et al published 15 November 2002 in Journal of Applied Physics

Self-Supported Three-Dimensional Nanoelectrodes for Microbattery Applications

Paulina is supported by:

About Paulina

Help