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List of works by Gottlieb S Oehrlein

Characterizing fluorocarbon assisted atomic layer etching of Si using cyclic Ar/C4F8 and Ar/CHF3 plasma.

scientific article published in February 2017

Effect of the chamber wall on fluorocarbon-assisted atomic layer etching of SiO2 using cyclic Ar/C4F8 plasma

scientific article published on 24 May 2016

Microscopic identification and electronic structure of a di-hydrogen-vacancy complex in silicon by optical detection of magnetic resonance

scientific article published on 01 June 1990

Polystyrene as a model system to probe the impact of ambient gas chemistry on polymer surface modifications using remote atmospheric pressure plasma under well-controlled conditions

scientific article

Strain-induced quantum confinement of carriers due to extended defects in silicon

scientific article published on 01 August 1990

Structure of the boron-hydrogen complex in crystalline silicon

scientific article published on 01 September 1987

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