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List of works by Shailesh Sharma

A spatially resolved retarding field energy analyzer design suitable for uniformity analysis across the surface of a semiconductor wafer

scientific article published in April 2014

Ion angle distribution measurement with a planar retarding field analyzer.

scientific article published in November 2015

Measurement of deposition rate and ion energy distribution in a pulsed dc magnetron sputtering system using a retarding field analyzer with embedded quartz crystal microbalance

scientific article published on 01 April 2016

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