A test vehicle and a two step procedure to evaluate a massive number of single-walled carbon nanotube field effect transistors

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Ampacity and electrical properties of thermally treated ultrathin carbon membranes grown by focused ion beam induced deposition of phenanthrane

Bottom-up silicon nanowire resonators for nanomechanical sensing: Controlled fabrication technology and high-sensitivity frequency modulation transduction

Dynamic stencil lithography on full wafer scale

Electrical transduction in nanomechanical resonators based on doubly clamped bottom-up silicon nanowires

Enabling electromechanical transduction in silicon nanowire mechanical resonators fabricated by focused ion beam implantation

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Evaluating the compressive stress generated during fabrication of Si doubly clamped nanobeams with AFM

Fabrication and electrical characterization of bottom-up silicon nanowire resonators

Fabrication of functional electromechanical nanowire resonators by focused ion beam implantation

Fabrication of functional electromechanical nanowire resonators by focused ion-beam (FIB) implantation

Frequency fluctuations in silicon nanoresonators

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High-sensitivity linear piezoresistive transduction for nanomechanical beam resonators

scientific article published in Nature Communications

Horizontally patterned Si nanowire growth for nanomechanical devices.

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Mass Sensors: Small 2/2009

Massive manufacture and characterization of single-walled carbon nanotube field effect transistors

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Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution

scientific article published on 11 July 2011

Monolithic CMOS-MEMS oscillators with micro-degree temperature resolution in air conditions

NEMS/CMOS sensor for monitoring deposition rates in stencil lithography

Nanomechanical Mass Sensor for Spatially Resolved Ultrasensitive Monitoring of Deposition Rates in Stencil Lithography

scientific article published on 01 February 2009

Nanomechanical mass sensor for monitoring deposition rates through confined apertures

Nanomechanical test structure for optimal alignment in stencil-based lithography

Optomechanical mass spectrometry

scientific article published on 29 July 2020

Top-Down CMOS-NEMS Polysilicon Nanowire with Piezoresistive Transduction

scientific article published on 14 July 2015

Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution

scientific article published on 18 March 2015

Tuning piezoresistive transduction in nanomechanical resonators by geometrical asymmetries