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List of works by Joan Marc Rafí

Blistering of atomic layer deposition Al2O3 layers grown on silicon and its effect on metal–insulator–semiconductor structures

Charge trapping analysis of Al2O3 films deposited by atomic layer deposition using H2O or O3 as oxidant

Effect of Processing Conditions on the Electrical Characteristics of Atomic Layer Deposited Al

Electrical characterization of atomic-layer-deposited hafnium oxide films from hafnium tetrakis(dimethylamide) and water/ozone: Effects of growth temperature, oxygen source, and postdeposition annealing

scholarly article by Hector Garcia et al published January 2013 in Journal of Vacuum Science & Technology A

Hole trap distribution on 2 MeV electron irradiated high-k dielectrics

P-spray implant optimization for the fabrication of n-in-p microstrip detectors

Threshold Switching and Conductance Quantization in Al/HfO2/Si(p) Structures

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