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List of works by Christophe Cardinaud

Effect of Cl2- and HBr-based inductively coupled plasma etching on InP surface composition analyzed using in situ x-ray photoelectron spectroscopy

article

Experimental design approach for deposition optimization of RF sputtered chalcogenide thin films devoted to environmental optical sensors

scientific article published on 14 June 2017

Mass spectrometry and in situ X-ray Photoelectron Spectroscopy investigations of organometallic species induced by the etching of germanium, antimony and selenium in a methane-based plasma

scientific article published in 2023

Mechanisms of oxygen plasma nanotexturing of organic polymer surfaces: from stable super hydrophilic to super hydrophobic surfaces

scientific article published on 01 October 2009

PMMA removal selectivity to PS using dry etch approach: sub-10nm patterning application

PMMA removal selectivity to polystyrene using dry etch approach

RF sputtered amorphous chalcogenide thin films for surface enhanced infrared absorption spectroscopy

Structural analysis of RF sputtered Ge-Sb-Se thin films by Raman and X-ray photoelectron spectroscopies

article published in 2016

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