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List of works by Younghee Lee

Atomic layer etching of Al2O3 using sequential, self-limiting thermal reactions with Sn(acac)2 and hydrogen fluoride

scientific article published on 29 January 2015

Coating Solution for High-Voltage Cathode: AlF3 Atomic Layer Deposition for Freestanding LiCoO2 Electrodes with High Energy Density and Excellent Flexibility

scientific article published on 28 February 2017

In Situ Thermal Atomic Layer Etching for Sub-5 nm InGaAs Multigate MOSFETs

scientific article published on 02 July 2019

Molecular Layer Deposition of Aluminum Alkoxide Polymer Films Using Trimethylaluminum and Glycidol

scientific article published on 18 November 2011

Prospects for Thermal Atomic Layer Etching Using Sequential, Self-Limiting Fluorination and Ligand-Exchange Reactions.

scientific article published in May 2016

Thermal atomic layer etching of HfO2 using HF for fluorination and TiCl4 for ligand-exchange

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