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List of works by Oili M.E. Ylivaara

Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion

scholarly article by Oili M.E. Ylivaara et al published February 2014 in Thin Solid Films

Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO Using Carbon Dioxide

scientific article published on 12 February 2019

Nanotribological, nanomechanical and interfacial characterization of atomic layer deposited TiO2 on a silicon substrate

Saturation profile based conformality analysis for atomic layer deposition: aluminum oxide in lateral high-aspect-ratio channels

scientific article published on 07 October 2020

Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors

Thermal conductivity of amorphous Al2O3/TiO2 nanolaminates deposited by atomic layer deposition.

scientific article published on 27 September 2016

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